mechatronic (sub) systems
fully qualified mechatronic modules and platforms
High-tech industries demand the highest performance from their equipment, while conditions concerning cleanliness and vacuum are challenging, throughput has to be maximized, footprint should be minimal and safety must be assured. Building on its expertise of the mechatronic design of high-end modules and integrated platforms, Aalberts advanced mechatronics has focused on developing, manufacturing and installing mechatronic (sub) systems for demanding applications in the semiconductor industry and beyond.
Aalberts advanced mechatronics specializes in mechatronic engineering and manufacturing of vacuum and atmospheric systems, offering OEMs a single-source high-level quality buy and full lifecycle support for integrated mechatronic (sub) systems that are fully qualified and meet the relevant vacuum requirements and cleanliness standards.
technologies mechatronical (sub) systems
integrated equipment modulesThe design of high-end mechatronic (sub) systems requires the integration of automation/handling technology, vibration isolation, vacuum technology and fluid control. Integrated mechatronic modules and platforms can be qualified regarding dynamic performance, throughput and cleanliness for vacuum applications such as lithography, metrology and material deposition, and atmospheric applications such as optical inspection and atomic force microscopy.
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