company profile
Design, engineering and manufacturing of environmental controls for active and passive vibration isolation, acoustic isolation and EMI cancellation. Mechatronic system integration in a cleanroom environment.

technologies
environmental control
mechatronic (sub) systems

competence
vibration isolation & EMI control
motion control & structural dynamics
material handling & service lifting
cleanroom assembly
full system qualification

system design & engineering 

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company profile
Engineering and  production of ultra high purity / ultra clean vacuum parts and modules. Cleanroom production of stand-alone gas and chemical supply systems.

technologies
ultra high purity (UHP)

competence
gas & liquid flow management
orbital welding
cleanroom assembly
UHP cleaning
UHP qualification
full system qualification

system design & engineering
new product industrialization

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company profile
Climate- controlled production of (ultra) large and accurate machine frames and vacuum chambers. Cleanroom integration and testing of functional modules.

technologies
ultra large and accurate machining
mechatronic (sub) systems

competence
machining
deep-hole drilling
(e-beam) welding
surface cleaning
cleanroom integration & testing

new product industrialization 

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​company profile
Specialist in the field of  pneumatics, vacuum technology, fluid control and deceleration technology. System supplier for the OEM market.

technologies
motion and fluid control

competence
pneumatics
vacuum technology
fluid control
deceleration technology
cleanroom assembly
cleanliness qualification

system design and engineering
new product industrialization

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technologies:

• mechatronic (sub) systems
• substrate handling (wafers, masks, flat panels)
• material handling and transport

competences:

Development, manufacturing, sales and service of turnkey customized systems/components for semiconductor and industrial automation